Niaj hnub no, nrog kev txhim kho txuas ntxiv ntawm cov txheej txheem tsim khoom, tuaj yeem muaj ntau dua 10 billion transistors hauv nti. Yuav ua li cas muaj ntau yam transistors ntsia?
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Thaum lub nti txuas ntxiv mus, nws zoo li lub nroog loj hauv.
Nov yog daim duab saum toj-down Saib SEM. Koj tuaj yeem pom meej cov txheej txheem txheej hauv CPU. Txoj kab dav yuav nqaim dua thaum koj nqis mus, ze rau cov txheej txheem ntaus ntawv.
Qhov no yog ib qho kev pom ntawm lub CPU. Koj tuaj yeem pom tseeb cov txheej txheem CPU txheej. Lub nti yog teem rau hauv txheej. Lub CPU no muaj txog 10 txheej. Cov txheej qis tshaj plaws yog cov txheej txheem ntaus ntawv, uas yog MOSFET transistor.
Thaum lub Mos raj yog loj nyob rau hauv lub nti, ib tug peb-dimensional qauv zoo li "podium" tuaj yeem pom. Lub transistor tsis muaj inductance, tsis kam lossis lwm yam khoom siv uas ua rau muaj cua sov. Cov txheej saum toj kawg nkaus yog cov khoom siv hluav taws xob tsawg, uas yog cais los ntawm lub platform hauv qab no los ntawm ib qho insulator. Nws feem ntau siv P-hom lossis N-hom polysilicon ua cov khoom siv raw rau lub rooj vag, thiab cov insulator hauv qab no yog silicon dioxide.
Ob sab ntawm lub platform yog qhov chaw thiab qhov ntws los ntawm kev ntxiv impurities, thiab lawv txoj haujlwm tuaj yeem hloov pauv. Qhov kev ncua deb ntawm ob yog cov channel, thiab nws yog qhov kev ncua deb uas txiav txim siab cov yam ntxwv ntawm cov nti.
Tau kawg, cov transistors hauv nti tsis yog Mos leeg xwb, tab sis kuj yog tri-gate transistors. Cov transistors tsis ntsia, tab sis engraved thaum lub sij hawm tsim chip.
Thaum tsim cov nti, tus tsim nti yuav siv EDA cov cuab yeej los npaj cov txheej txheem ntawm lub nti, thiab tom qab ntawd txoj kev thiab txoj kev.
Yog tias peb zoom rau ntawm lub rooj vag tsim, cov dots dawb yog cov substrate, thiab qee cov ciam teb ntsuab yog cov doped txheej.
Lub wafer foundry yog tsim raws li lub cev layout tsim los ntawm tus tsim nti.
Muaj ob txoj hauv kev tsim cov chips. Ib qho yog tias wafers tau loj dua thiab loj dua, yog li ntawd cov chips ntau dua tuaj yeem txiav tawm kom txuag tau qhov ua tau zoo. Lwm qhov yog cov txheej txheem tsim chip. Lub tswv yim ntawm kev tsim cov txheej txheem yog qhov loj ntawm lub rooj vag, uas tseem tuaj yeem hu ua Hauv cov qauv transistor, tam sim no ntws los ntawm qhov chaw mus rau qhov dej ntws, thiab lub rooj vag (Gate) yog sib npaug rau lub rooj vag, uas yog lub luag haujlwm tseem ceeb rau tswj qhov on-off ntawm qhov chaw thiab ntws ntawm ob qho kawg.
Qhov tam sim no yuav ploj mus, thiab qhov dav ntawm lub rooj vag txiav txim siab qhov poob thaum tam sim no dhau mus, uas tau tshwm sim nyob rau hauv cov khoom siv hluav taws xob thiab kev siv hluav taws xob ntawm cov xov tooj ntawm tes. Qhov dav dav, qhov qis dua qhov kev siv hluav taws xob. Qhov tsawg kawg nkaus qhov dav (qhov ntev) ntawm lub rooj vag yog cov txheej txheem tsim khoom.
Lub hom phiaj ntawm kev txo qis cov txheej txheem nanometer yog ntim cov transistors ntau dua rau hauv cov nti me, kom cov nti yuav tsis loj dua vim kev txhim kho thev naus laus zis.
Tab sis yog tias peb ua lub rooj vag me me, qhov nrawm dua tam sim no yuav ntws nruab nrab ntawm qhov chaw thiab qhov ntws, qhov txheej txheem yuav nyuaj dua.
Cov txheej txheem tsim cov nti tau muab faib ua xya qhov chaw loj, uas yog diffusion, photolithography, etching, ion implantation, zaj duab xis loj hlob, polishing, thiab metallization. Photolithography thiab etching yog ob theem tseem ceeb.
Transistors yog engraved los ntawm lithography thiab etching, thiab lithography yog ua kom lub circuits thiab functional thaj chaw uas yuav tsum tau rau chips.
Lub teeb tawm los ntawm lub tshuab photolithography yog siv los nthuav tawm cov ntawv coated nrog photoresist los ntawm photomask nrog cov qauv. Lub luag haujlwm ntawm daim duab.
Qhov no yog lub luag haujlwm ntawm lithography, zoo ib yam li kev thaij duab nrog lub koob yees duab. Cov duab thaij los ntawm lub koob yees duab luam tawm ntawm qhov tsis zoo, thiab lithography tsis luam cov duab, tab sis daim duab kos duab thiab lwm yam khoom siv hluav taws xob.
Etching yog cov txheej txheem ntawm kev xaiv tshem tawm cov khoom tsis xav tau los ntawm qhov chaw ntawm silicon wafer siv cov tshuaj los yog lub cev. Nyob rau hauv cov txheej txheem wafer li niaj zaus, cov txheej txheem etching yog nyob tom qab cov txheej txheem photolithography, thiab cov txheej txheem photoresist yuav tsis raug eroded los ntawm corrosion qhov chaw thaum lub sij hawm etching, thiaj li ua kom tiav cov txheej txheem ntawm cov qauv hloov. Cov txheej txheem etching yog ib kauj ruam tseem ceeb hauv kev rov ua daim npog ntsej muag.
duab
Ntawm lawv, cov khoom koom nrog yog photoresist. Peb yuav tsum paub tias cov qauv tsim hluav taws xob yog thawj zaug sau rau ntawm photomask los ntawm laser, thiab tom qab ntawd lub teeb qhov chaw yog irradiated los ntawm lub npog ntsej muag mus rau saum npoo ntawm silicon wafer nrog photoresist, ua rau thaj chaw raug photoresist muaj tshuaj lom neeg, thiab tom qab ntawd thaj chaw raug los yog tsis raug pov tseg yog yaj thiab tshem tawm los ntawm kev tsim technology, kom cov qauv Circuit Court ntawm lub npog ntsej muag raug xa mus rau photoresist, thiab thaum kawg tus qauv yog pauv mus rau silicon wafer los ntawm etching technology.
Photolithography muab faib ua ob txheej txheem yooj yim, zoo photolithography thiab tsis zoo photolithography, raws li qhov sib txawv ntawm qhov zoo thiab tsis zoo photolithography. Nyob rau hauv qhov zoo photolithography, cov qauv ntawm qhov nthuav tawm ntawm qhov zoo tiv thaiv raug rhuav tshem thiab ntxuav tawm los ntawm cov kuab tshuaj, kom cov qauv ntawm photoresist yog tib yam li cov qauv ntawm lub npog ntsej muag.
Conversely, nyob rau hauv tsis zoo-tone lithography, lub exposed feem ntawm qhov tsis zoo tiv thaiv hardens thiab ua insoluble, thiab daim npog qhov ncauj yog ntxuav tawm los ntawm cov hnyav, ua tus qauv ntawm lub photoresist qhov opposite ntawm tus qauv ntawm daim npog qhov ncauj.
Peb tuaj yeem piav qhia cov kauj ruam no los ntawm qib micro.
Lub phaj photoresist ua ntej yog them rau ntawm wafer (los yog silicon wafer) coated nrog photoresist, thiab ces lub wafer yog irradiated nrog ultraviolet rays rau ib lub sij hawm ntawm lub sij hawm los ntawm lub photoresist phaj. Lub hauv paus ntsiab lus yog siv ultraviolet rays kom degrade ib feem ntawm photoresist thiab ua kom yooj yim rau corrode.
Dissolving photoresist: Lub photoresist raug ultraviolet lub teeb nyob rau hauv cov txheej txheem photolithography yog yaj, thiab cov qauv sab laug tom qab tshem tawm yog zoo ib yam nrog rau ntawm daim npog qhov ncauj.
"Etching" txhais tau hais tias tom qab photolithography, lub deteriorated ib feem ntawm lub photoresist (zoo tiv thaiv) yog etched tam sim ntawd nrog ib tug etching tov, thiab lub nto ntawm lub wafer qhia tus qauv ntawm lub semiconductor ntaus ntawv thiab nws kev twb kev txuas. Tom qab ntawd siv lwm cov tshuaj etching rau etch lub wafer los tsim cov khoom siv semiconductor thiab lawv cov circuits.
Kev tshem tawm ntawm photoresist: Tom qab etching tiav, lub hom phiaj ntawm photoresist tau tshaj tawm tiav, thiab cov qauv tsim Circuit Court tuaj yeem pom tom qab tshem tawm tag nrho.
Ntau tshaj 10 billion transistors tau carved nyob rau hauv no txoj kev, thiab transistors yog siv nyob rau hauv ib tug ntau yam ntawm cov digital thiab analog functions, xws li amplification, switching, voltage regulation, signal modulation thiab oscillators.
Ntau cov transistors tuaj yeem ua rau kev ua tau zoo ntawm cov processor; Ntxiv mus, txo qhov loj me tuaj yeem txo qhov kev siv hluav taws xob; Thaum kawg, tom qab lub nti txo qhov loj me, nws yooj yim dua rau ntsaws rau hauv lub xov tooj ntawm tes kom ua tau raws li cov kev xav tau ntawm lub neej yav tom ntej thinning thiab lightening.
Duab Chip Transistor Hla Ntu
Tom qab 3nm, cov transistors tam sim no tsis tsim nyog lawm, thiab kev lag luam semiconductor tam sim no tab tom tsim cov nanosheet FETs (GAA FETs) thiab nanowire FETs (MBCFETs), uas yog suav tias yog txoj hauv kev rau hnub no finFETs.
Samsung tab tom twv ntawm GAA rooj vag-ncig transistor thev naus laus zis, uas TSMC tseem tsis tau tshaj tawm cov txheej txheem tshwj xeeb. Samsung thawj zaug tshaj tawm GAA puag ncig lub rooj vag transistor hauv 2019. Raws li Samsung cov lus tshaj tawm, raws li GAA transistor qauv tshiab, Samsung tsim MBCFET (Multi-Bridge-Channel FET, multi-bridge-channel effect transistor) los ntawm kev siv cov khoom siv nanosheet. ), uas tuaj yeem txhim kho kev ua haujlwm ntawm transistor thiab hloov FinFET transistor technology.
duab
Tsis tas li ntawd, MBCFET thev naus laus zis kuj tau sib xws nrog FinFET cov txheej txheem tsim khoom thiab cov khoom siv uas twb muaj lawm, yog li ua kom cov txheej txheem tsim kho thiab ntau lawm.
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